1. Introduction
In the fast-evolving world of semiconductor manufacturing, not every production line demands the latest EUV or ArF immersion systems. Many facilities focusing on analog, MEMS, and power semiconductor production still rely on mature-node technologies. For these applications, the Nikon NSR 2005 i8A remains one of the most reliable and cost-effective i-line lithography solutions on the market.

Originally designed for 8-inch wafer fabs, the NSR 2005 i8A combines robust performance with simplified maintenance and operational consistency. Its proven optical alignment system and field-tested durability make it a preferred option for fabs aiming to maintain high throughput while keeping operational costs under control.
As a professional distributor of second-hand Nikon steppers, we specialize in sourcing, refurbishing, and delivering NSR 2005 i8A tools in excellent condition. Whether you're expanding legacy production lines or building capacity for cost-sensitive devices, this model continues to provide outstanding value.
2. Technical Overview of the NSR 2005 i8A
The Nikon NSR 2005 i8A is an i-line stepper using a 365 nm mercury lamp as its light source, tailored for critical dimension (CD) processes around the 0.7–0.8 µm node. It's engineered to support 6" and 8" wafers with precision step-and-repeat exposure.
Core Specifications of the NSR 2005 i8A
Parameter | Specification |
---|---|
Exposure Wavelength | i-line (365 nm) |
Resolution Capability | ~0.7–0.8 µm |
Wafer Size Support | 150 mm (6") and 200 mm (8") |
Overlay Accuracy | ≤ 0.25 µm (dependent on calibration & setup) |
Alignment System | TTL (Through-the-Lens) alignment system |
Field Size | 22 mm x 22 mm (typical) |
Throughput | ~80–100 wafers per hour (varies with process) |
Stage Type | X-Y mechanical stage with auto focus control |
With Nikon’s legacy projection optics and robust autofocus mechanism, the NSR 2005 i8A ensures consistent patterning on critical layers for mature process nodes. It is especially suited to foundries and IDMs that produce high volumes of discrete components, sensors, and driver ICs.
3. Advantages of the NSR 2005 i8A in Modern Manufacturing
While many fabs chase cutting-edge geometries, the bulk of semiconductor demand still lies in mature nodes. This is where the NSR 2005 i8A shines — offering a powerful combination of cost-efficiency, reliability, and technical adequacy.

Key Advantages
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Ideal for Analog and Power Devices
These devices often require larger feature sizes, where i-line resolution is more than sufficient. -
Low Cost of Ownership
The tool’s straightforward design means less downtime, easier maintenance, and cheaper parts than newer scanners. -
Field-Proven Stability
With thousands of NSR-2000 series units installed worldwide, the i8A has a well-documented track record of reliability. -
Broad Industry Compatibility
Supports photoresists and process recipes commonly used across multiple foundries and industries. -
Ease of Operator Training
Intuitive interface and standard operating modes reduce training time for technicians and operators.
4. Comparison with Other Nikon NSR i-Line Models
To place the i8A in the broader Nikon portfolio, it’s helpful to compare it with related models like the i10C, i12, and i14. Each model serves different levels of resolution and application scope.
Nikon NSR i-Line Model Comparison Table
Model | Resolution Capability | Process Node Target | Ideal Applications | Cost Level |
---|---|---|---|---|
NSR 2005 i8A | ~0.7–0.8 µm | ≥0.7 µm | Analog, MEMS, power, LEDs | Low |
NSR-2005i10C | ~0.5 µm | 0.5 µm | CMOS, general ICs | Moderate |
NSR-2205i12D | ~0.35 µm | 0.35 µm | DRAM, logic ICs, tighter pitch circuits | Higher |
NSR-2205i14E | ~0.3 µm | ≤0.3 µm | High-density RF, microprocessors | High |
From this comparison, the NSR 2005 i8A emerges as the most practical and affordable model for users targeting ≥0.7 µm processes. It serves as an excellent workhorse in fabs that don’t require submicron critical dimensions, but still demand throughput, precision, and stability.
5. Why Choose Second-Hand Nikon NSR 2005 i8A Machines
For semiconductor manufacturers operating within mature nodes, second-hand equipment can deliver exceptional ROI—particularly when the tool is professionally inspected, refurbished, and calibrated. The Nikon NSR 2005 i8A is an ideal candidate for reuse due to its mechanical simplicity, durable architecture, and ongoing parts availability.

Key Reasons to Opt for Refurbished NSR 2005 i8A:
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Significant Cost Reduction
New lithography tools can cost millions of dollars. A refurbished i8A unit offers similar capabilities at a fraction of the price. -
Consistent Production Performance
With proper refurbishment, the tool’s exposure accuracy, throughput, and mechanical reliability can closely match OEM standards. -
Reduced Lead Time
Delivery of a refurbished tool typically takes weeks instead of months, enabling faster fab ramp-up or replacement of downed equipment. -
Process Proven
The NSR 2005 i8A is widely adopted across hundreds of 6” and 8” wafer fabs. Process recipes, photoresist compatibility, and know-how are already industry standard. -
Robust Service Ecosystem
Parts, engineering support, and operator training are widely available from the aftermarket and specialist vendors.
6. Our Company’s Offering: Reliable Second-Hand NSR 2005 i8A Machines
As a dedicated supplier of second-hand Nikon steppers, our company has deep technical understanding and extensive experience in the procurement, inspection, refurbishment, and deployment of tools like the NSR 2005 i8A.
What We Provide:
Service Category | Details |
---|---|
Equipment Condition | Professionally cleaned, tested, and fully functional machines |
Refurbishment Services | Optical alignment, mechanical calibration, lamp and stage reconditioning |
Customization | System configuration per customer's fab layout and process requirements |
Documentation & Support | User manuals, operation guides, startup training available |
Installation Services | On-site installation and acceptance test support upon request |
Warranty Options | Flexible warranty plans available depending on scope and budget |
We maintain an active inventory of NSR 2005 i8A units and also provide sourcing services if you have specific configuration or delivery timeline requirements. Our engineering team includes lithography veterans who ensure each machine meets OEM-level expectations.
7. Conclusion
The Nikon NSR 2005 i8A remains one of the most robust, cost-effective lithography platforms for 8-inch wafer processing. Its enduring popularity stems from its strong performance in 0.7–0.8 µm nodes, low maintenance overhead, and wide compatibility with legacy manufacturing processes.
If you’re operating in sectors such as power devices, MEMS, analog ICs, sensors, or optoelectronics, the NSR 2005 i8A can provide all the reliability and precision you need—without the cost burden of next-generation scanners.
✅ Partner with a Proven Supplier
We invite you to contact us to explore our current inventory of refurbished Nikon NSR 2005 i8A steppers, request a technical consultation, or schedule a machine demonstration. Our team is ready to help you reduce your lithography cost per wafer while maximizing uptime and output.