I. Introduction
Wuxi Junr Technology Co., Ltd. (JUNR), established in 2007 in Jiangsu Province, China, is a trusted provider of second-hand and refurbished semiconductor equipment, specializing in lithography tools. Serving foundries, PSS manufacturers, and CP test facilities, we supply a wide range of equipment accessories, consumables, and expert-level technical services—including disassembly, installation, refurbishment, and maintenance.
With operations in both mainland China and Hong Kong, JUNR has built strong partnerships with leading equipment and component suppliers across the United States, Japan, South Korea, Taiwan, and Singapore. This global collaboration enables us to deliver timely, high-quality solutions with a strong cost-performance advantage. As an active member of SEMI, we are deeply engaged with industry standards and trends.
This article presents a technical overview of the world’s top 10 lithography companies, from the perspective of a service provider embedded in the supply chain. Whether you're seeking advanced tools or mature-node equipment, we invite you to contact JUNR for professional support and collaboration.
II. The Importance of Lithography in Semiconductor Manufacturing
Lithography is the cornerstone of semiconductor device fabrication. It is the process of transferring circuit patterns onto wafers using light, playing a critical role in defining feature sizes, layer alignment, and overall device performance.
As semiconductor technology scales down to sub-10nm nodes, lithography methods have evolved significantly—from traditional i-line and KrF systems to ArF immersion and extreme ultraviolet (EUV) lithography. Each technique offers distinct advantages in resolution, throughput, and cost, depending on the manufacturing node and application.
Beyond logic and memory fabrication, lithography also supports advanced packaging, MEMS, and compound semiconductor production, where specialized equipment and mature-node tools remain essential. Understanding the capabilities and focus areas of leading lithography suppliers helps manufacturers make informed equipment investment decisions—especially when considering refurbished systems.
III. Top 10 Lithography Companies (Detailed Profiles)
The lithography equipment market is highly specialized and dominated by a few global leaders that drive technological innovation and supply chain influence. These companies vary significantly in their technological focus—ranging from extreme ultraviolet (EUV) systems for advanced logic chips to mature-node deep ultraviolet (DUV) tools and niche electron beam (E-beam) or nanoimprint systems. Below is a curated list of the ten most influential lithography equipment manufacturers in the world, based on technological contributions, industry relevance, and global footprint.
1. ASML (Netherlands)
ASML is the undisputed leader in semiconductor lithography technology, particularly known for its exclusive capability in EUV lithography. Headquartered in Veldhoven, the Netherlands, ASML works closely with top chipmakers such as TSMC, Intel, and Samsung. Its EUV systems are essential for sub-7nm manufacturing nodes, while its DUV immersion systems remain widely used across mature and mid-level nodes.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| ASML | 1984 | Sole supplier of EUV systems; global leader in DUV immersion lithography | https://www.asml.com |
2. Nikon Corporation (Japan)
Nikon is a major player in DUV lithography, particularly known for ArF and KrF stepper and scanner systems. While it has gradually scaled down its presence in cutting-edge nodes due to ASML’s EUV dominance, Nikon remains competitive in legacy and specialized markets such as image sensors and MEMS.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| Nikon Corporation | 1917 | Pioneered ArF/ArF immersion systems; strong legacy in KrF steppers | https://www.nikonprecision.com |
3. Canon Inc. (Japan)
Canon specializes in mature-node lithography and nanoimprint lithography (NIL). Its steppers are widely used for i-line and KrF applications, especially in compound semiconductors and display manufacturing. Canon also invests in NIL as a potential cost-effective alternative to EUV for certain sub-20nm use cases.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| Canon Inc. | 1937 | Leader in KrF/i-line steppers; active in nanoimprint R&D | https://global.canon/en/product/indtech/semicon/ |
4. Veeco Instruments Inc. / Ultratech (USA)
Ultratech, acquired by Veeco in 2017, is a key provider of advanced packaging lithography systems. It focuses on 3D ICs, fan-out wafer-level packaging (FOWLP), and high-brightness LED lithography. Their tools are widely used in back-end semiconductor manufacturing.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| Veeco Instruments Inc. | 1945 (Ultratech in 1979) | Industry leader in advanced packaging and FOWLP lithography | https://www.veeco.com |
5. Onto Innovation (USA)
Formed from the merger of Rudolph Technologies and Nanometrics, Onto Innovation provides lithography alignment systems and metrology tools crucial for packaging and process control. While not a pure-play stepper manufacturer, it plays an important role in back-end lithography and inspection.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| Onto Innovation | 2019 (Rudolph founded 1940) | Strong in lithography alignment and packaging metrology | https://www.ontoinnovation.com |
6. SMEE (Shanghai Micro Electronics Equipment, China)
SMEE is China’s most advanced domestic lithography equipment supplier. Though currently limited to KrF and i-line exposure systems, SMEE is making significant strides in ArF immersion development. It serves foundries and OSATs within China’s self-reliance initiatives.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| SMEE | 2002 | Leading Chinese KrF/i-line supplier; developing ArF immersion tools | http://www.smee.com.cn |
7. EV Group (Austria)
EVG specializes in lithography for advanced packaging, MEMS, and compound semiconductor devices. The company is a global leader in nanoimprint lithography (NIL), wafer bonding, and mask alignment systems.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| EV Group (EVG) | 1980 | Global leader in NIL and wafer-level packaging lithography | https://www.evgroup.com |
8. SÜSS MicroTec (Germany)
SÜSS MicroTec develops mask aligners and photolithography equipment for MEMS, LED, and advanced packaging markets. Its systems support high-mix, low-volume manufacturing with precision and flexibility.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| SÜSS MicroTec | 1949 | Strong in mask aligners and high-accuracy packaging lithography | https://www.suss.com |
9. JEOL Ltd. (Japan)
JEOL is a pioneer in electron beam lithography (EBL), offering tools used in R&D, photomask production, and nanotechnology prototyping. Its systems are popular among research institutions and universities.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| JEOL Ltd. | 1949 | Leader in electron beam lithography for nanofabrication and R&D | https://www.jeol.com |
10. Raith GmbH (Germany)
Raith focuses exclusively on nanolithography and electron beam lithography tools. It serves a niche market of nanotechnology research, providing systems for high-resolution patterning and direct-write applications.
Company Snapshot:
| Company Name | Founded | Key Lithography Achievements | Website |
|---|---|---|---|
| Raith GmbH | 1980 | Specialized in high-resolution E-beam lithography systems | https://www.raith.com |
IV. Conclusion
The lithography sector remains the most technologically critical and capital-intensive segment of semiconductor manufacturing. While ASML leads in advanced EUV technology, other companies like Nikon, Canon, and EVG continue to play indispensable roles across diverse application areas—from legacy node production to advanced packaging, MEMS, and research-driven nanolithography.
At the same time, the global supply chain is undergoing structural changes. Geopolitical shifts, rising demand for localized production, and the growth of legacy-node applications have increased interest in cost-effective alternatives to brand-new equipment. In this context, second-hand and refurbished lithography tools—when properly sourced and serviced—offer an efficient, reliable, and economically viable solution for many fabs and packaging lines.
At Wuxi Junr Technology Co., Ltd., we understand the technical and logistical challenges of lithography tool deployment. With over 15 years of experience, an international sourcing network, and an expert technical team, we are committed to helping our customers find the right equipment at the right cost—with full support from installation to after-sales maintenance.
If your fab or facility is seeking dependable, high-performance lithography solutions—whether for front-end or back-end applications—we welcome you to contact JUNR for consultation and cooperation. Together, we can build smarter, more sustainable semiconductor production capacity for the future.





