TSK APM 90A Prober – Used & Refurbished Sales, Specifications

1. Introduction to the TSK APM90A Prober

In semiconductor wafer testing, a prober plays a critical role by positioning wafers with extreme precision so electrical tests can be conducted before dicing. The TSK APM90A Prober, manufactured by ACCRETECH (Tokyo Seimitsu), has earned a solid reputation for reliability, accuracy, and cost efficiency.

Even though it’s not the newest platform on the market, the APM90A continues to be widely deployed in CP (Chip Probing) and PCM (Process Control Monitoring) processes, especially in foundries, assembly & test plants, and engineering labs. Many semiconductor companies prefer the APM90A because it offers the right balance between performance and total cost of ownership (TCO).

2. Core Features and Technical Highlights

The TSK APM90A was engineered to deliver stable, repeatable wafer probing for a range of wafer sizes and test requirements. Its success lies in a combination of robust mechanics, dependable electronics, and flexible software.

Key Features Include:

• High-Precision Chuck Stage – Ensures minimal planarity error for consistent probe contact.

• Advanced Optical Alignment – Supports pattern recognition for rapid die alignment.

• Z-Axis Control – Maintains accurate overdrive settings for consistent probe needle penetration.

• Throughput Efficiency – Optimized stage movement and quick alignment cycles.

The APM90A’s design allows for multiple test modes, making it adaptable to different product lines without excessive changeover time.

3. Detailed Specifications of the TSK APM90A Prober

This specification profile reflects typical factory configurations. Custom configurations may vary depending on options installed and customer upgrades.

4. Advantages of Choosing a Used or Refurbished APM90A

For many semiconductor operations, a refurbished TSK APM90A is a smart investment. The decision often comes down to performance, budget, and support availability.

Main Advantages:

1. Cost Efficiency – Typically 50–70% less expensive than new-generation probers.

2. Mature Supply Chain – Spare parts and consumables are readily available.

3. Proven Reliability – Decades of field use with a strong track record in 24/7 operations.

4. Compatibility – Works seamlessly with most mainstream testers in the industry.

When paired with professional refurbishment and upgrades, the APM90A can achieve performance close to newer UF200A platforms, making it an excellent value for high-volume production and R&D.

5. Upgrade and Modernization Options

Technology evolves, and so do performance expectations in wafer probing. Fortunately, the TSK APM90A is well-suited for modernization, allowing fabs to extend its lifecycle without a full replacement.

Typical Upgrade Paths Include:

• Control System Enhancement – Updating controllers for faster processing and better motion control.

• Vision System Upgrade – Installing higher-resolution cameras and improved lighting for faster, more accurate alignment.

• Performance Tuning – Chuck planarity adjustment, stage lubrication, and Z-axis calibration for improved contact repeatability.

• Automation Integration – Adding SECS/GEM connectivity for integration with MES and automated handlers.

These upgrades not only improve throughput but also enhance data accuracy, helping manufacturers meet tighter process tolerances.

6. Refurbishment and Quality Assurance Process

A properly refurbished TSK APM90A is far more than just a cleaned-up used machine — it is restored to a condition that meets or exceeds original specifications. At JUNR, refurbishment follows a structured, multi-stage process:

Refurbishment Steps:

1. Incoming Inspection – Mechanical, electrical, optical, and safety systems are evaluated.

2. Component Replacement – Worn or damaged parts such as belts, bearings, and sensors are replaced with OEM-grade components.

3. Calibration – Chuck planarity, stage accuracy, and alignment systems are adjusted to factory tolerances.

4. Software & Firmware Update – Ensuring compatibility with modern testers and data formats.

5. Factory Acceptance Test (FAT) – Full wafer runs are performed to validate stability, accuracy, and throughput.

Every refurbished APM90A is delivered with a performance report, calibration certificate, and recommended preventive maintenance schedule.

7. Preventive Maintenance and Common Troubleshooting

Even a well-built prober like the APM90A requires regular care to sustain accuracy and minimize downtime.

Recommended PM Schedule:

• Daily: Clean chuck surface, check vacuum performance, inspect probe card seating.

• Weekly: Inspect stage movement, clean optical lenses, verify pattern recognition accuracy.

• Quarterly: Lubricate mechanical components, check belts and wiring, recalibrate Z-axis.

• Annually: Overhaul stage assembly, replace high-wear parts, verify system grounding and ESD protection.

Common Troubleshooting Examples:

• Misalignment Issues → Check vision system cleanliness and recalibrate.

• Poor Contact Repeatability → Inspect chuck planarity and probe needle wear.

• Vacuum Loss → Check vacuum lines and seals for leakage.

8. Spare Parts and Consumables Support

The availability of spare parts is one of the main reasons many fabs still operate the APM90A. JUNR maintains a ready-to-ship inventory to minimize downtime.

High-Demand Spare Parts:

• Chuck vacuum assemblies

• Stage drive belts and motors

• Optical system cameras and lighting modules

• Control boards and I/O modules

Common Consumables:

• Probe cards for specific device layouts

• Wafer marking inks and dotters

• Cleaning media for chuck and probes

By sourcing directly from reliable suppliers and maintaining inventory, JUNR ensures customers get parts quickly — a key factor in keeping high-volume lines running.

9. Buying Guide for a Used TSK APM90A

Choosing a used prober should be a calculated decision based on technical needs and supplier credibility.

Checklist Before Purchase:

• Verify mechanical condition (stage smoothness, chuck planarity).

• Check optical alignment system for clarity and calibration capability.

• Confirm software version and tester compatibility.

• Request a test run demonstration with a full wafer to assess throughput and yield impact.

Supplier Considerations:

• Does the seller provide a warranty and installation service?

• Are spare parts and upgrades readily available?

• Is there after-sales technical support?

Selecting a partner like JUNR ensures not just equipment supply, but also training, installation, and lifecycle support.

10. Why Partner with JUNR for APM90A Solutions

JUNR Technology has over 15 years of expertise in ACCRETECH and EG prober systems, providing customers with more than just machines — we deliver complete solutions.

Our Capabilities:

• Whole Unit Sales – New and refurbished TSK APM90A systems.

• Performance Upgrades – Bringing APM90A performance close to UF200A-level.

• Rapid Parts Supply – Large inventory for urgent repairs.

• On-Site Service – Installation, calibration, and operator training.

• Long-Term Support – Preventive maintenance programs and technical consulting.

By combining engineering know-how with customer-focused service, JUNR ensures your APM90A delivers reliable performance for years to come.