HP 5517A, 5517B,5517C,5517CL,5517D,5517DL,5517EL,5517FL,5517GL Laser Interferometers

1. Introduction to the HP 5517 Interferometer Series

In precision metrology and motion control systems, laser interferometers are essential tools for achieving sub-micron accuracy in stage positioning. The HP 5517 series occupies a distinguished place in this space. These two-frequency helium-neon interferometers have been widely used over decades in semiconductor, optical, and precision engineering systems.

From the early 5517A to the advanced 5517GL, each model in the series offers incremental enhancements in frequency stability, linear velocity, and measurement capability. For users of precision motion stages, the HP 5517 series represents a mature and reliable solution.

At JunR Technology, we refurbish and supply full ranges of the HP 5517 family. Whether you require a 5517A, 5517CL, or 5517GL, customers can turn to us for professionally tuned units, calibration, and support.

2. Evolution & Model Differences

One reason the HP 5517 line remains relevant is the careful incremental evolution across models, each serving slightly different use cases. Below is a brief walkthrough of how the series develops:

• 5517A

  The baseline model. It provides dependable two-frequency output with modest reference frequency stability and linear speed suited for standard precision systems.

• 5517B

  Enhances frequency stability and supports higher linear velocities. Useful when stage motion demands increase.

• 5517C

  Further boosts output frequency and measurement robustness. Offers multiple beam diameter options (3 mm, 6 mm, 9 mm) for flexibility in alignment designs.

• 5517CL

  A compact version—same core performance as the C model but in a more compact head, suited when space or weight restrictions exist.

• 5517D / DL

  These models push the frequency range further, enabling higher speeds and more demanding environments. The DL version is designed for lower noise and cleaner signal stability.

• 5517EL / FL / GL

  Tailored for high-end metrology:

  • EL emphasizes ultra-high frequency stability.

  • FL offers fine-line measurements with better linearity.

  • GL is the top-tier version, combining the best stability, linearity, and velocity performance of the series.

Each incremental model improves on one or more parameters—frequency range, allowable linear velocity, noise performance, or output beam diameter options.
This flexibility makes the 5517 series adaptable to a broad set of precision measurement demands.

3. Technical Specifications & Performance Metrics

To understand where each model fits, it helps to see a comparative spec table. Below is a collated reference using public data (refined and curated by our engineers at JunR).

4. Typical Applications of the HP 5517 Series

The HP 5517 family has become a standard component in many high-precision systems across the semiconductor and industrial landscape.
Below are several representative use cases where these interferometers play a critical role:

4.1 Semiconductor Lithography and Wafer Stages

In stepper and scanner systems, sub-micron accuracy is crucial for aligning and positioning wafers.
The HP 5517’s dual-frequency interferometric measurement allows nanometer-level displacement monitoring.
Common OEM integrations include:

• Nikon and Canon lithography steppers

• TSK / ACCRETECH probing and wafer-inspection stations

• KLA-Tencor and Hitachi metrology platforms

4.2 Precision Machine Tools and Coordinate Measuring Machines (CMMs)

For ultra-precision machining or CMM calibration, a stable laser interferometer provides linear scale traceability.
Users often integrate HP 5517 heads with Renishaw or Agilent measurement electronics for axis calibration.

4.3 Research and Metrology Laboratories

Universities and national labs frequently use the HP 5517 series in optical-path length stabilization, vibration analysis, and interferometric refractometry experiments.

5. Why Choose JunR Technology for HP 5517 Systems

Selecting a supplier for precision optical metrology components is not just about price—it’s about trust, expertise, and sustainability.
JunR Technology has positioned itself as one of the few specialized distributors and service providers capable of handling the entire HP 5517 product line.

Our Advantages:

1. Comprehensive Inventory
   We maintain stock for most HP 5517 models—from the entry-level 5517A to high-end 5517GL units.

2. Factory-Level Refurbishment Standards
   All equipment is restored by experienced engineers trained in optical alignment, ensuring long-term stability.

3. Traceable Calibration
   Every interferometer ships with a certified calibration report traceable to national standards.

4. Flexible Service Options

   • Trade-in for defective or end-of-life units

   • Fast replacement program to minimize production downtime

   • Technical consulting for system integration or retrofit upgrades

5. Global Client Support
   Our customers include semiconductor fabs, metrology labs, and academic institutions across Asia, Europe, and North America.

Conclusion

The HP 5517 laser interferometer series remains one of the most respected precision measurement solutions in the world.
From the entry-level 5517A to the advanced 5517GL, each model represents decades of optical engineering excellence.
Through professional refurbishment and calibration, JunR Technology ensures these legendary systems continue to deliver nanometer-level precision for the next generation of semiconductor and metrology applications.