C1 Vacuum System
2.1 Pneumatic Panel ( Classic ) - 02-00012-00
| 1 | 17-00014-02 | Box, Pneumatic panel Novellus |
| 2 | 19-00260-10 | Manifold ,10-station (mod) Novellus |
| 3 | 60-00022-00 | Manifold , 4-station Skinner KR-01-013 |
| 4 | 60-00023-00 | Valve , Solenoid, 4-W Skinner K4R04-24VDC |
| 5 | 60-00006-00 | Valve , Solenoid, 3-W SKinner K3P02-24VDC |
| 6 | 16-00071-01 | Cover , Pneumatic Box Novellus |
| 7 | 22-00242-00 | Tee , Union , 1/4 inch OD smc KQT07-00 |
| 8 | 22-00092-00 | Tee, Male , 1/8 inch NPT * 1/4 tube seagelok B-400-3TMT |
| 9 | 39-00134-00 | Coupling , Pneu , 10-Air Colder TMB-10 |
| 10 | 39-00087-00 | Adaptor , Panel Mount , 10-Air Colder TPM-10 |
| 11 | 10-00040-00 | Tubing , 1/8 inch OD , PVC ADI 1311 |
| 12 | 10-00049-00 | Tubing , 1/4 inch OD , Polypro parker E-43-0500 |
| 13 | 15-00292-01 | Plate , Multiple Coupling (Top) Novellus |
| 14 | 15-00292-02 | Plate , Multiple coupling ( Bottom ) Novellus |
| 15 | 19-00072-00 | Insert , Tube Fitting , 1/8 inch colder TMF-02 |
| 16 | 22-00435-00 | Gasket , Buna N , 1/8 inch Clippard 11761-2 |
| 17 | 22-00103-00 | Plug , Barb Fitting , 1/4 inch parker 20-4 |
| 18 | 22-00171-00 | Fitting , 10-32 ST*1/8 inch Barb ADI 1051 |
| 19 | 22-00181-00 | Coupling , Panel Mt., 1/8 inch FLow , 1/4 inch , Shutoff Colder MCD 12-04 |
| 20 | 22-00182-00 | Insert , Stragight , 1/8 inch Flow , 1/4 inch , shutoff colder MCD 20-04 |
| 21 | 22-00184-00 | Elbow , 10-32 ST , w/Long Stud (1123) NG ADI 1125 |
| 22 | 22-00185-00 | Elbow , 10-32 ST , w/short stud （1124） ADI 1107 |
| 23 | 22-00192-00 | Connector , 10-32 * 1/8 inch , Ferruless Polytube colder TF 10-02 |
| 24 | 22-00198-00 | Coupling , MALE , Multiple , 1/4 inch colder mmd 20-04 |
| 25 | 39-00066-00 | Connector , DB25 M ITT cANNON db-25P |
| 28 | 60-00029-01 | Clamp , Tube , 1/4 inch , Delrin ADI 1401 |
| 29 | 60-00029-02 | Clamp, Tube , 1/8 inch , Delrin ADI 1400 |
| 30 | 31-00172-00 | Wire marker Weidmuller 3125.5 |
| 31 | 31-00173-00 | Wire Marker Weidmuller 3113.5 |
| 37 | 20-00167-00 | Washer ,Nylon , 0.503 inch dia OLander 5606-40-31 |
| 42 | 22-00617-00 | Gasket , Fiber , 0.170 ID * 5/16 OD Clippard 11761-3 |
2.2 Pneumatic Panel ( New Gen ) 02-00094-00
| 1 | 17-00331-00 | Box, Pneumatic Panel Novellus |
| 2 | 19-00260-10 | Manifold ,10-station (mod) Novellus |
| 3 | 60-00022-00 | Manifold , 4-station skinner KR-01-013 |
| 4 | 60-00023-00 | Valve ,solenoid , 4-W skinner K4R04-24VDC |
| 5 | 60-00006-00 | Valve ,solenoid , 3-w skinner K3P02-24VDC |
| 6 | 16-00097-00 | Cover , Pneumatic Box Novellus |
| 7 | 19-00260-05 | Mainifold , 5-station Novellus |
| 8 | 22-00092-00 | Tee, Male , 1/8 inch NPT * 1/4 Tube swagelok B-400-3TMT |
| 9 | 39-00087-00 | Adaptor , Panel Mount , 10-Air Colder TPM-10 |
| 10 | 39-00134-00 | Coupling , pneu , 10-Air colder TMB-10 |
| 11 | 10-00040-00 | Tubing , 1/8 inch OD , PVC ADI 1311 |
| 12 | 10-00049-00 | Tubing , 1/4 inch OD , Polypro parker E-43-0500 |
| 13 | 15-00292-01 | Plate , Multiple coupling TOP Novellus |
| 14 | 15-00292-02 | Plate , Multiple coupling ( bottom) Novellus |
| 15 | 19-00072-00 | Insert , Tube fitting , 1/8 inch colder TMF-02 |
| 16 | 22-00435-00 | Gasket , Buna N , 1/8 inch Clippard 11761-2 |
| 17 | 22-00103-00 | Plug , Barb Fitting , 1/4 inch parker 20-4 |
| 18 | 22-00171-00 | Fitting , 10-32 ST * 1/8 inch Barb ADI 1051 |
| 19 | 22-00181-00 | Coupling ,Panel MT., 1/8 inch Flow , 1/4 inch , shutoff Colder MCD 12-04 |
| 20 | 22-00182-00 | Insert , straight , 1/8 inch flow ,1/4 inch , shutoff colder MCD 12-04 |
| 21 | 22-00184-00 | Elbow , 10-32 ST , w/long stud 1123 NG ADI 1125 |
| 22 | 22-00185-00 | Elbow , 10-32 ST , w/short stud 1124 ADI 1107 |
| 23 | 22-00323-00 | Fitting , 10-32 ST * 1/8 inch SMC KQH 01-32 |
| 24 | 22-00198-00 | Coupling , Male , Mutiple , 1/4 inch colder MMD 20-04 |
| 25 | 39-00066-00 | Connector ,DB25 M ITT Cannon DB -25 P |
| 28 | 60-00029-01 | Clamp , Tube , 1/4 inch Delrin ADI 1401 |
| 29 | 60-00029-02 | Clamp, Tube , 1/8 inch Delrin ADI 1400 |
| 30 | 31-00172-00 | Wire marker weidmuller 3125.5 |
| 31 | 31-00173-00 | Wire marker weidmuller 3113.5 |
| 37 | 20-00167-00 | Washer , Nylon , 0.503 inch , Dia Olander 5606-40-31 |
| 42 | 22-00322-00 | Fitting ,10-32, Swivel Clippard 15040 |
| 43 | 22-00321-00 | Fitting , 10-32 , Nipple Clippard 11999 |
