2.3 Purge panel ( standard ) 02-00471-00
1 17-00342-00 Bracket , N2 Purge panel Novellus 2 17-00343-00 Panel , N2 Purge panel assy Novellus 3 10-00282-00 Tube assy , Upper purge panel novellus 4 10-00281-00 Tube Assy , Lower purge panel novellus 5 10-00412-00 Valve assy , Spindle purge Novellus 6 22-00417-00 Gasket / Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS 7 22-00612-00 Valve , Pneumatic , NC , 1/4 inch VCR Nupro 6LV-DAFR4-P-C 8 22-00090-00 Filter , 0.2 micron , high flow millipore WGGB 06W R1 9 22-00010-00 Fitting , Bulkhead, 1/4 inch VCR Cajon SS4-VCR-61 10 22-00244-00 Elbow , male , 1/8 inch MPT -1/8 Tube SMC KQL01-345 11 10-00421-00 Tubing ,purge line , 1/16 inch novellus 102 31-00007-01 switch , wafter flow flotecto V6EPBSDLF 103 22-00237-00 Connector , 1/2 inch MPT * 3/8 TUBE swagelok ss-600-1-8 104 60-00101-00 Switch , Air pres , 35-80 Psig ASCO HB10A215 105 22-00270-00 Tee, Branch , 1/8 inch MPT * 1/4 INCH SWG Swagelok SS-400-3TTM 201 10-00241-00 Tube assy , water flow out Novellus 202 10-00242-00 Tube assy , flow-sw connect nobelus 208 22-00701-00 Connector , 1/4 inch NPT * 3/8 inch SWG Swagelok ss-600-1-4 210 03-00238-00 Switch assy , water flow , w/ Cable Novellus 220 10-00279-00 Tube assy , Purge panel to loadlock novellus 230 10-00186-00 Valve assy , purge needle Novellus
