2.4 02-00286-00 Purge panel ( soft start)
1 17-00250-00 Panel, purge/Backfill Novellus 2 22-00706-00 Valve , piezo , 2 sulm stec PV-2203-MC 3 10-00250-00 Tube assy , filter , purge /BF Novellus 4 10-00251-00 Tube assy , purge/ BF valves Novellus 5 10-00412-00 Valve assy , spindle purge novellus 6 15-01026-00 Spacer , Piezo valve Mtg Novellus 7 27-00160-00 Controller , Piezo valve stec SA-H 8 22-00417-00 Gasket / Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS 10 22-00612-00 Valve , Pneumatic ,NC , 1/4 INCH VCR Nupro 6LV-DAFR4-P-C 11 22-00090-00 Filter , 0.2 micron ,High flow millipore WGGB06W R1 18 22-00244-00 Elbow , Male , 1/8 inch MPT - 1/8 INCH Tube SMC KQLO1-34S 22 27-00161-00 Power supply , BF Softstart , 24VDC noveellus 23 34-00213-00 Switch , pneumatic , 60 PSI , SPDT Novellus 26 38-00047-00 Cable , AC Power supply , 10A 125 VAC Belden 17750 30 03-00244-01 Cable assy , CA 267 Novellus 36 28-00094-00 Resistor , 4.7k ALLEN Bradley 10F305 37 28-00063-00 Resistor , 2.2 K 60 10-00421-00 Tubing ,Purge line , 1/16 inch novellus 62 28-10039-00 Resistor , 200k
