2.5 Loadlock pressure control - 02-00282-00
| 1 | 19-00227-00 | Controller ,press , throttle valve (loadlock ) MKS 652A-BB |
| 2 | 17-00227-00 | Panel , Half Novellus |
| 3 | 03-00225-00 | Cable assy , CA 258 , Valve input novellus |
| 4 | 03-00232-00 | Cable assy , CA 259 , Sensor novellus |
| 101 | 10-00264-00 | Tube assy , pressure control and 10 Torr novellus |
| 102 | 10-00432-00 | Tube assy , pressure control signal novellus |
| 103 | 27-00149-01 | Manometer , differential , 1 torr MKS 223BD-0001-AAUS |
| 104 | 60-00020-00 | Flange , Blankoff , NW25 HPS-31-1603 |
| 105 | 60-00018-00 | Clamp , Alum , NW25 HPS 31-2903 |
| 106 | 60-00019-00 | Ring , Centering , O-ring , KF25 HPS 31-2603 |
| 107 | 22-00417-00 | Gasket /Retainer , 1/4 inch VCR ,Ni Cajon NI-4-VCR-2-GR-VS |
| 111 | 22-00014-01 | Nut , Female 1/4 VCR Blank Cajon ss-4-vcr-1-8L |
| 112 | 10-00433-00 | Tube assy , LL Differential pressure Novellus |
