3.1 Upper Gas distribution
1 17-00236-00 Housing, Gas vent A/B Novellus 2 34-00056-00 Switch, Interlock MicroSwitch 22AC2 3 15-00332-00 Bracket , Interlock Switch Novellus 4 22-00434-00 O-ring , 0.239inch * 0.070 , Buna parker 2-010-N741-70 5 15-00727-00 Bracket , A/B GAS Line Novellus 6 15-00726-00 Clamp , A/B Gas line Novellus 7 15-11606-00 Insulator , Gas Dist , Ceramic Novellus 8 22-00612-00 valve , Pneumatic , NC , 1/4 , VCR Nupro 6LV-DAFR4-P-C 9 22-00199-00 Elbow , 90 degree, 3/8 inch Novellus 10 10-00079-00 Tube Assy , B-Gas , Upr , VCO 150MM Novellus 10 10-00046-00 Tube Assy , B-Gas , Upr , VCR 150MM Novellus 10 10-00101-00 Tuve Assy, B-Gas,, Upr , VCO 200MM Novellus 10 10-00130-00 Tube Assy , B-Gas , Upr ,VCR 200MM Novellus 11 10-00080-00 Tube Assy , A-Gas , Upr , VCO 150MM Novellus 11 10-00045-00 Tube Assy , A-Gas , Upr , VCR 150MM Novellus 11 10-00102-00 Tubee Assy , A-Gas , Upr , VCO 200 Novellus 11 10-00129-00 Tube Assy , A-Gas , Upr, VCR 200MM Novellus 12 22-00244-00 Elbow , 1/8inch MPT * 1/8 INCH Tube SMC kQL01-345 13 22-00417-00 Gasket / Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS 14 22-00006-00 Filter , Wafergard, LP-Mini , 1/4 inch VCR Milliporte WG2FT1RR2 15 19-00299-00 Manifold , Dual Injection , Heated Novellus 16 10-00082-00 Tube assy , A-Gas , Lwr , VCO 150MM Novellus 16 10-00085-01 Tube assy , A-Gas , Lwr , VCR 150MM Novellus 16 10-00395-01 Tube Assy , A-Gas , Lwr ,VCR 150MM-NG Novellus 16 10-00097-00 Tube assy , A-Gas , Lwr , VCO 200MM Novellus 16 10-00131-00 Tube Assy , A-Gas , Lwr , VCR , 200MM nOVEELLUS 17 10-00082-02 Tube Assy , B-Gas , Lwr , VCO 150MM Novellus 17 10-00085-02 Tube Assy , B-Gas , Lwr , VCR 150MM Noveellus 17 10-00396-01 Tube Assy , B-Gas , Lwr , VCO 150MM-NG Novellus 17 10-00396-02 Tube Assy , B-Gas , Lwr , VCR 150MM-NG , Novellus 17 10-00096-00 Tube assy , B-Gas , Lwr , VCO 200MM Novellus 17 10-00128-00 Tube Assy , B-Gas , Lwr , VCR 200MM Novellus
