3.5 Top plate Lift Mechanism
| 6 | 15-00007-01 | Pad , Rubber, Lift Drive 150mm Novellus |
| 6 | 15-00604-00 | Pad, Rubber , Lift Drive 200mm Novellus |
| 7 | 16-00145-00 | Bracket , Pillow Block 150mm Novellus |
| 7 | 16-00164-00 | Bracket , Pillow Block 200mm Novellus |
| 8 | 15-00004-01 | Support ,, Lift Bar Novellus |
| 9 | 15-00004-02 | Support , LIft Bar Novellus |
| 11 | 15-00122-01 | Support , shaft guide , 1.5" Dia 150mm Novellus |
| 11 | 15-00620-00 | Support , Shaft guide , 1.5" Dia 200mm Novellus |
| 12 | 15-00320-00 | Bracket , Lift drive Limit Switch Novellus |
| 13 | 15-00224-00 | Clamp , Lift shaft Novellus |
| 15 | 20-00020-01 | Block , Twin pillow (1.5" Bushing ) Thomson TWN-24 |
| 16 | 20-00180-00 | SCREW , shldr , 10-32 *1.25" , SS motion Ind . PZ-26-3 |
| 35 | 34-00102-00 | Switch , Overtravel plunger Microswitch BZ-ZRQ-A2 |
| 36 | 20-00064-00 | Spring , Compression , 7/8 " *0.36" Motion IND . SPR1-7 |
| 46 | 19-00028-00 | shaft , 1.5" Dia , LIFT( Mod ) Novellus |
| 76 | 27-00101-00 | drive mechanism , top plate lift novellus |
| 90 | 15-00015-01 | plate , Lift drice mechanism 150mm novellus |
| 90 | 15-00622-00 | plate , lift drive mechanism 200mm novellus |
