5.3 Spindle Indexer Assembly
| 6 | 15-00358-00 | Stop Block , spindle Lift , 1.12L 150MM Novellus |
| 6 | 15-00737-00 | Stop Block , spindle lift , 1.03L 200MM Novellus |
| 6 | 15-00737-01 | Stop Block , spindle lift , 0.93L 200MM HDR Novellus |
| 7 | 15-00359-00 | Flange , spline ,Top Novellus |
| 9 | 15-00361-00 | Screw , spindle Height Adjust Novellus |
| 10 | 15-00362-00 | Flange , spline , Bottom Novellus |
| 13 | 15-00414-00 | Clamp , Thrust Washer Novellus |
| 14 | 15-00413-00 | Washer , Thrust , Spline Assy Novellus |
| 17 | 15-00412-00 | Flange , Spline Bearing Novellus |
| 19 | 15-00376-00 | Pin , Spindle Lift Guide Novellus |
| 22 | 17-00083-00 | Cage , Indexer assembly 150mm Novellus |
| 22 | 17-00126-00 | Cage , Indexer assembly 200mm novellus |
| 23 | 17-00084-00 | Flag , Spindle lift sensor , 0.63 150mm Novellus |
| 23 | 17-00170-00 | Flag , Spindle lift sensor , 0.54 200mm Novellus |
| 23 | 17-00170-00 | Flag, Spindle lift sensor ,0.54 200MM Novellus |
| 23 | 17-00170-01 | Flag, spindle lift sensor , 0.44 200mm HDR novellus |
| 27 | 15-00616-00 | wheel,Geneva 200mm novellus |
| 28 | 19-00079-00 | shaft , spline , w/housing novellus |
| 29 | 20-00155-00 | Washer ,wave seastrom Mfg 5806-72-2 |
| 34 | 60-00183-00 | Elbow , Flow Control , 1/4 " OD SMC NAS2200-F-N01-075 |
| 27 | 15-00479-00 | Wheel , Geneva 150mm Novellus |
| 37 | 22-00248-00 | Bearing , 3/8" * 7/8" Motion Ind . SR6R |
| 38 | 22-00261-00 | Bearing , spline assy SKF 61906 |
| 45 | 60-00091-00 | Cylinder , pneumatic , Spindle lift Bimba 1-1/8 3/4 TBE |
| 46 | 03-00063-00 | Harness Assy , Sensor , Spindle Novellus |
| 59 | 21-00059-00 | Screw , SkHd , 5/16 -18 * 3/4 ” SS common |
| 60 | 21-00064-00 | Washer , Flat , #10 , SS common |
| 61 | 21-00151-00 | Washer , Lock #10 , SS common |
| 62 | 20-00181-00 | Nut , Aero , 5/16 -24 , Thin Mcmaster -Carr 90100A030 |
| 71 | 21-00047-00 | screw , SKHd , 10-32 * 3/8 " , SS common |
| 75 | 03-00067-00 | cable assy , cable 119 Novellus |
