6.3 Loadlock Cooling station - 02-00350-00
| 1 | 15-01108-00 | Cooling plate ,Dual Novellus |
| 2 | 10-00365-00 | Tube , Lower - Inlet Novellus |
| 3 | 22-00662-00 | Union , Reducing 3/8 to 1/4 Swagelok SS-600-6-4 |
| 4 | 22-00749-00 | Bulkhead , Reducer 3/8 to 1/4 Swagelok SS-600-R1-6 |
| 5 | 10-00367-00 | Tube , Lower - Outlet Novellus |
| 6 | 22-00678-00 | Tube, 1/4 *1/4 Swage swagelok SS-400-6 |
| 7 | 10-00366-00 | Tube , Upper- Outlet Novellus |
| 8 | 22-00725-00 | O-ring , Cooling station parker 2-041-V747-75 |
| 9 | 22-00252-00 | Fitting , Elbow 1/4 Swage Swagelok SS-400-2-4ST |
| 10 | 10-00363-00 | Tube , Bottom Plate -Membrane Novellus |
| 11 | 15-01107-00 | Panel , LL Side DCS Novellus |
| 12 | 22-00136-00 | O-ring , LL Left Plate , 15.475" * 0.275" ,, Bunae parker 2-460-N674-70 |
| 13 | 16-00025-00 | Window , Loadlock side ,Lexan Novellus |
| 14 | 22-00134-00 | O-ring , LL window , 5.975" * 0.210" , Buna parker 2-361-N674-70 |
| 15 | 10-00364-00 | Tube , Upper - Inlet Novellus |
