1 | 15-01004-00 | Platform , cassette, Optical 100/125/150mm Novellus |
2 | 15-01116-00 | Bracket, Multiple cassette Holder Novellus |
3 | 15-00313-01 | Blade , wafer placement Noveellus |
4 | 15-00314-01 | Rod , wafer aligner novellus |
7 | 15-00293-01 | Hook , Bracket ,right 100/125/150mm Novellus |
8 | 15-00293-02 | Hook , Bracket , left 100/125/150mm Novellus |
11 | 02-00343-04 | hARNESS assy , Sensor 26.5" Novellus |
12 | 02-00343-02 | Harness Assy , Sensor 12.0" Novellus |
13 | 02-00343-03 | Harness Assy , Sensor , 17.5" Novellus |
15 | 02-00330-00 | Board Assy , Sense Pin Breakout Novellus |
30 | 17-00337-00 | Flag , Opto-Sensor Nove |
accessories | 15-01158-00 | Bracket , Paddle , 100mm Novellus |
| 15-00486-00 | Bracket , Paddle, 125mm Novellus |
| 15-00485-00 | Bracket , Paddle , 150mm Novellus |
| 70-00055-00 | Cassette ,Metal , 100mm , Solid END H-Square MC-4HC |
| 70-00054-00 | Cassette, Metal , 125mm, Solid END H-square MC-5HC |
| 70-00053-00 | Cassette , Metal , 150mm , Solid END H-Square MC-6HC |
| 15-01050-01 | Shims, Paddle , 0.01" THK Novellus |
| 15-01050-02 | Shims , Paddle , 0.002" THK Novellus |
| 15-01050-03 | Shiims , Paddle , 0.003" Thk Novellus |
| 15-01124-00 | Paddle , Optical , 100mm Novellus |
| 15-01123-00 | Paddle , Optical 125mm Novellus |
| 15-01111-00 | Paddle, Optical , 150 mm Novellus |