| DESCRIPTION | P/N |
| P.M | Strap Lf Bias Aluminum 17 (2Hole) | 17-103987-00 |
| O-Ring 7.475" X 0.210" Viton(AS367) | 22-00657-01 | |
| O-Ring,7.48"×0.139",VITON, Sight Glass | 22-00234-00 | |
| O-Ring,7.45"×0.275",VITON, Chamber Wall L/L Door | 22-00236-00 | |
| SCREW, FORK (FINGER FORK SCREW) | 15-00698-00 | |
| Screw,HexHd,1/4-20*1/4",Ni | 15-00341-00 | |
| Screw, 1.12LG, Top Spinlde | 15-00399-05 | |
| Screw, 1.02LG, Top Spindle | 15-00399-04 | |
| Screw heater strap | 15-00457-00 | |
| Nut, 10-32UNF-2B, Nickel | 15-00385-00 | |
| Washer, Flat,1/4",Alum | 20-00222-00 | |
| Washer, heater Strap (1/4 NI) | 15-00372-00 | |
| Washer, Flat, #10, Nickel | 15-00386-00 | |
| Wire, Insulated, Ceramic Bead, Short | 16-00092-00 | |
| Wire, Insulated, Ceramic Bead, Long | 16-00098-00 | |
| Shaft, Spindle_Magnetic Seal Type | 02-110772-00 | |
| Clamp, Rotation Adjustment | 15-00654-00 | |
| Clamp, Flat | 15-00729-00 | |
| Flange, Keyed | 15-00730-00 | |
| Lubricant, High Vacuum(Oil, Torr-lube) | 20-00109-00 | |
| Process Kit | Heater Block ,Slotted, 200mm (NON-NOTCH) | 19-00154-01 |
| Showerhead, Pinned, 200mm | 16-033931-00 | |
| Plate, Fork Retainer, Top, 200mm | 15-00702-00 | |
| Plate, Fork Retainer,Bottom, 200mm | 15-00700-00 | |
| Fork, Finger, 200mm | 15-00699-02 | |
| Feedthru, 3/8' O-Seal, Ultratorr | 15-00685-00 | |
| Insulator, Gas Feedthru,Ceramic | 15-00475-00 | |
| Washer, Feedthru, 1/2" ID,Alum | 15-00686-00 | |
| Nut, Hex, 1/2-20, Alum | 15-00229-00 | |
| O-Ring, 0.362" x 0.170",Viton, S/H Gas Line 부 | 22-00345-00 | |
| O-Ring, 0.364" x 0.070",Viton, | 22-00344-00 | |
| O-Ring, 0.864" x 0.070",Viton | 22-00391-00 | |
| O-ring, 1.984" x 0.139",Buna | 22-00021-01 | |
| Hanger, Nozzle, 1.50"(200mm) | 15-00309-01 | |
| Nut, 8-32 UNC-2B, Alum | 20-00212-00 | |
| Guide, Nozzle Adjuster | 15-00027-02 | |
| Adjuster, Ceramic, Gas Plate | 15-00043-02 | |
| Irregular | System Main Control Assy | - |
| Matching Network, AMU2-1, w/ Arc Sensor | 27-121645-00 | |
| RFG-5500 | 27-115617-00/27-034213-00 | |
| PDX1400 | 27-00196-00 | |
| Controller, Press., Throttle Valve (Reactor) | 27-00009-00 | |
| Instrument Panel Assy - Temp Controll Assy | 02-00195-10 | |
| Controller Pres Throttle Valve | 27-00009-10 | |
| Valve, Gate, Hi Vac, 4" 24VDC | 60-00003-00 | |
| Valve, Angle, 2" - L/L Chamber 용(KF50) | 19-00249-00 | |
| Vacuum Transducer, KF25 Flange | 60-00180-00 | |
| Feedthru Assy, Electrical | 19-00056-00 | |
| Seal Elect Feedthru Teflon | 15-00374-10 | |
| UPPER FITTINFM ELECT FEEDTHRU | 15-00374-11 | |
| Ferrel Elect Feedthru | 15-00374-12 | |
| Lower Fitting Elect Feedthru | 15-00374-13 | |
| Elect Pole Feedthru Brass | 15-00374-16 | |
| Rf Feedthru Ceramic Inner Seath Assy | 02-111903-10 | |
| Thermocouple, Type J 1/8' | 27-00010-01 | |
| Thermocouple, Type E, LG 1/16 | 27-00127-00 | |
| Tube, TC,1/8"ID, Ceramic | 15-00567-00 | |
| Cap, TC,1/16'ID, Ceramic | 15-00684-00 | |
| window, Sapphire (VIEWPORT) | 15-01143-00 | |
| Manometer, Cap., 10 Torr (Baratron Gauge 626A11Tbe (10Torr)) | 60-00214-00 | |
| Switch, Diaphram Pres, 20 Torr (Vacuum Switch 15Torr) | 60-00194-00 | |
| Inductor, RF Isolation | 03-00299-00 | |
| O-Ring 31.12" X 0.275" Viton 200mm | 22-00361-00 | |
| Paddle, Dimple, 200mm | 15-01127-00 | |
| Megapac 4output P/S with NVL Inf' B'd - 1 Set | 02-041000-00 | |
| Cylinder, Pneumatic, LL Door (CYLINDER) | 60-00013-00 | |
| Cylinder, Pneumatic, Cass Door | 60-00012-00 | |
| One Arm Robot Assembly | 02-00093-00 | |
| Robot arm kit (without paddle or bracket) | 02-00269-00 | |
| Lower Spindle Actuator Ass'y | - | |
| FC-PAR7800C-4V N2/5slm | ||
| FC-PAR7800C-4V SiH4/1slm | ||
| FC-PAR7810C-4V N2O/20slm | ||
| FC-PAR7810C-4V NH3/5slm | ||
| FC-PAR7810C-4V C2F6/5slm | ||
| FC-PAR7810C-4V O2/5slm | ||
| MFC CABLE (GENDER) |
产品信息
C1 全系列配件
发布时间：2023/03/14 浏览量：1404
PM PARTS For C1 UPGRADED
