MARKV

TEL-MARK8-1

Mark Vz
Mark7/Mark8
Wafer size (mm)
75,100,150
100,150,200
Availability
Certified used
Certified used
Throughput (wph)
Inline:60
Inline: 90
Process
i-line
i-line, KrF
Substrates
Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LT
Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LT
Additional features
Transfer robot
Enclosed system

关于君睿产品信息设备服务

	Mark Vz	Mark7/Mark8
Wafer size (mm)	75,100,150	100,150,200
Availability	Certified used	Certified used
Throughput (wph)	Inline:60	Inline: 90
Process	i-line	i-line, KrF
Substrates	Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT	Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT
Additional features	Transfer robot	Enclosed system