TEL MARK-V MARKVZ MARK 7/8 DNS 设备销售及技术服务
君睿科技是专业的Track服务商，我们为客户提供TELMARKV-8DNS60A-90B的维修、改造(6改4，6改8)以及安装调试等专业服务，为客户提供各种配件和耗材，提供胶泵及TELMARKV等机台的马达和驱动器等，欢迎您的咨询选购。
- TEL MARK8 System Includes:
- ● Configured for 200 mm wafers
- ● Dual Coat and Dual Develop stations
- ● Carrier Station(C/S)1x4 side load
- ● M12 Process Frame with Main Arm
- ● Environmental Enclosure with ULPA Filtration
- ● TEL Clean Track Act 8 single block 200 mm photo resistwafer track confiqured with two coaters and two developers.
- ● The TEL Clean Track Act 8 is the industry standard
- 200mm coater/developer,
- providing airbornechemical filtration,
- innovative chemicaldispense systems,
- and excellent thermaluniformity of PEB hotplates allowing for.
Mark Vz Mark7/Mark8 Wafer size (mm) 75,100,150 100,150,200 Availability Certified used Certified used Throughput (wph) Inline:60 Inline: 90 Process i-line i-line, KrF Substrates Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LTSi, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LTAdditional features Transfer robot Enclosed system
